Ключевые слова: 3d, accuracy, advanced high, analysis, automatic, check, control, development, device, engineering, equipment, examine, imaging, industrial, industry, innovation, instrument, investigate, laser, layers, lenses, machine, magnification, manufacture, manufacturing, measurement, measuring, micro, microscope, multiple, nanometer, objective, optic, optical, precision, probe, process, programmable, quality, researchers, roughness, specimen, study, surface, system, technology, tool, verify, vision, visual,