Ключевые слова: aes, analysis, analyzer, argon, atom, auger, chamber, chemical, coating, composition, copper, deposition, electron, element, emission, energy, film, gas, glass, green, high vacuum, high voltage, innovation, investigation, ion, laboratory, metal, nanotechnology, plasma, polished, preparation, primary, profiling, project, purity, research, sample, science, scientific, secondary, semiconductor, silicon, sims, sputtering, steel, technology, titanium, university, vacuum, viewport,